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The Copper Showroom features products from Copper Alliance members to provide a
complete copper process for the Semiconductor Industry. The SpeedFam-IPEC AvantGaard 776
Orbital Chemical Mechanical Planarization (CMP) System provides complete dry-in/dry-out
wafer processing. The Novellus Dual SEQUEL EXPRESS offers a low risk manufacturing
solution, superior film quality, and high productivity with minimal non-value added time.
The Novellus INOVA is an advanced PVD system that delivers highly conformal barrier and
seed layers for copper metallization. The Novellus SABRE is an advanced electrofill system
that enables void-free copper in extremely narrow, high aspect ratio IC structures without
backside contamination. The Lam Research Exelan dual-frequency dielectric etch system
provides the lowest cost of ownership solution for sub-0.18 um devices.